PROCESS KIT ENCLOSURE SYSTEM

Organization Name

applied materials, inc.

Inventor(s)

Helder Lee of San Jose CA (US)

Nicholas Michael Kopec of Sunnyvale CA (US)

Leon Volfovski of Foster City CA (US)

Douglas R. Mcallister of San Ramon CA (US)

Andreas Schmid of Meyriez (CH)

Jeffrey Hudgens of San Francisco CA (US)

Yogananda Sarode Vishwanath of Bangalore (IN)

Steven Babayan of Los Altos CA (US)

PROCESS KIT ENCLOSURE SYSTEM

This abstract first appeared for US patent application 20250087524 titled 'PROCESS KIT ENCLOSURE SYSTEM

Original Abstract Submitted

a process kit enclosure system includes walls and a retention device structure. the retention device structure includes a retention device post and a retention device fin. the retention device fin in a first position is disposed above and secures a process kit ring supported in the interior volume of the process kit enclosure system. the retention device fin is rotated from the first position to be in a second position to be outside a boundary of the process kit ring. the retention device post is aligned with and inserts into a recess formed by a top cover of the process kit enclosure system responsive to the retention device post being in the first position. the retention device post is misaligned with and blocked from inserting into the recess formed by the top cover responsive to the retention device post of the retention device structure being in the second position.