Applied materials, inc. (20250087471). MULTI-STAGE PUMPING LINER
MULTI-STAGE PUMPING LINER
Organization Name
Inventor(s)
Mingle Tong of San Jose CA (US)
MULTI-STAGE PUMPING LINER
This abstract first appeared for US patent application 20250087471 titled 'MULTI-STAGE PUMPING LINER
Original Abstract Submitted
exemplary semiconductor processing systems may include a pumping system, a chamber body that defines a processing region, and a pumping liner disposed within the processing region. the pumping liner may define an annular member characterized by a wall that defines an exhaust aperture coupled to the pumping system. the annular member may be characterized by an inner wall that defines a plurality of apertures distributed circumferentially along the inner wall. a plenum may be defined in the annular member between interior surfaces of the walls. a divider may be disposed within the plenum, where the divider separates the plenum into a first plenum chamber and a second plenum chamber, wherein the first plenum chamber is fluidly accessible from the apertures defined through the inner wall, and wherein the divider defines at least one aperture providing fluid access between the first plenum chamber and the second plenum chamber.