SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET

Organization Name

applied materials, inc.

Inventor(s)

Adolph Miller Allen of Oakland CA (US)

Karthik Ramanathan of Bangalore (IN)

Girish Venkatachalapathy of Alzenau (IN)

Umesh M. Kelkar of Santa Clara CA (US)

Kasturi Tulashidas Sarang of San Jose CA (US)

Yimeng Lyu of Mountain View CA (US)

Weize Hu of Sunnyvale CA (US)

Ying Teng of Pacheco CA (US)

Sejune Cheon of Seoul (KR)

Shiqi Dong of Milpitas CA (US)

Paul Gerard Kiely of Santa Cruz CA (US)

Milan Prakash of Bangalore (IN)

SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET

This abstract first appeared for US patent application 20250086356 titled 'SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET

Original Abstract Submitted

a method, apparatus, and system for controlling a multi-chamber system configured to process substrates are described herein. in some embodiments, a method comprises automatically determining, by each digital twin device a first data set associated with a corresponding process chamber of process chambers. the plurality of digital twin devices captures and models characteristics and processes of process chambers and generates control inputs for controlling the process chambers or processes executed by the chambers during the manufacturing of substrates. the method further comprises automatically generating, by each digital twin device, a second data set that comprises control inputs, and automatically transmitting the second data set to the process chamber.