COMPREHENSIVE MODELING PLATFORM FOR MANUFACTURING EQUIPMENT

Organization Name

applied materials, inc.

Inventor(s)

Ala Moradian of San Jose CA (US)

Umesh Kelkar of Cupertino CA (US)

Prashanth Kothnur of San Jose CA (US)

Karthik Ramanathan of Bangalore (IN)

Preetham Rao of Morgan Hill CA (US)

Mudit Pasagadagula of Saratoga CA (US)

Anup Kumar D. Doddamane of Davangere (IN)

COMPREHENSIVE MODELING PLATFORM FOR MANUFACTURING EQUIPMENT

This abstract first appeared for US patent application 20250086342 titled 'COMPREHENSIVE MODELING PLATFORM FOR MANUFACTURING EQUIPMENT

Original Abstract Submitted

a method includes receiving, via a graphical user interface (gui), by a processing device, a first user input to view data associated with a first process chamber in a first chamber data mode. data of the first chamber data mode includes data of a process operation performed in the first process chamber. the method further includes providing, for display on the gui, first display data of the first data chamber mode responsive to receiving the first user input. the method further includes receiving a second user input to view data associated with the first process chamber in a second chamber data mode. data of the second chamber data mode includes data of a virtual process operation performed by a virtual representation of the first process chamber. the method further includes providing, for display on the gui, second display data of the second data chamber mode.