Applied materials, inc. (20250084529). HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
Organization Name
Inventor(s)
Arvinder ManmohanSingh Chadha of San Jose CA (US)
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
This abstract first appeared for US patent application 20250084529 titled 'HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
Original Abstract Submitted
a method includes: identifying property data associated with a substrate support system; identifying target performance data associated with the substrate support system; determining, based on the property data and the target performance data, zone configuration data associated with the substrate support system; and causing the substrate support system to be configured based on the zone configuration data.