Applied materials, inc. (20250083312). SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL
SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL
Organization Name
Inventor(s)
Saitanay Naribole of Telangana (IN)
Venkata Raghavaiah Chowdhary Kode of Pflugerville TX (US)
Jagadeesh Kilaru of Karnataka (IN)
Chandrakant M. Sapkale of Bangalore (IN)
Michael Carl Hankes of Austin TX (US)
SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL
This abstract first appeared for US patent application 20250083312 titled 'SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL
Original Abstract Submitted
a substrate gripping system includes a plunger body actuatable by an actuator and a gripper at a distal end of the plunger body. the gripper is configured to grip a substrate responsive to actuation of the plunger body by the actuator. the system further includes a sensor configured to measure a value of a parameter associated with actuation of the plunger body and a controller configured to cause the actuator to actuate the plunger body based at least partially on the value of the parameter measured by the sensor.