Applied materials, inc. (20250083308). PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD
PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD
Organization Name
Inventor(s)
Damon K. Cox of Jarrell TX (US)
Ali Utku Pehlivan of Austin TX (US)
Paul Benjamin Reuter of Austin TX (US)
PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD
This abstract first appeared for US patent application 20250083308 titled 'PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD
Original Abstract Submitted
a method includes causing an upper process kit ring to be removed from a lower process kit ring. the method further includes, responsive to causing the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring. the method further includes, responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.