Applied materials, inc. (20250069959). ADAPTIVE WAFER BOW MANAGEMENT
ADAPTIVE WAFER BOW MANAGEMENT
Organization Name
Inventor(s)
Mayur Govind Kulkarni of Bangalore (IN)
ADAPTIVE WAFER BOW MANAGEMENT
This abstract first appeared for US patent application 20250069959 titled 'ADAPTIVE WAFER BOW MANAGEMENT
Original Abstract Submitted
a sensor can be configured to measure wafer bowing characteristics associated with a bow of a wafer after a first fabrication process is performed on the wafer in a first processing chamber and before a second fabrication process is performed on the wafer in a second processing chamber. a transfer chamber, including the sensor, can be coupled to a first process chamber and a second process chamber. the wafer bowing characteristics can be used by a controller to determine recipe parameters. the recipe parameters can be used by the controller to control environmental conditions in the transfer chamber and/or processing chamber and cause the processing chamber to perform its associated fabrication process using the recipe parameters.