Applied materials, inc. (20250069864). SUSCEPTOR HEAT TRANSFER
SUSCEPTOR HEAT TRANSFER
Organization Name
Inventor(s)
Arvinder ManmohanSingh Chadha of San Jose CA (US)
Syed Nazmul Ahsan of Folsom CA (US)
SUSCEPTOR HEAT TRANSFER
This abstract first appeared for US patent application 20250069864 titled 'SUSCEPTOR HEAT TRANSFER
Original Abstract Submitted
a substrate support assembly including a shaft and a susceptor disposed on the shaft. the susceptor is configured to support a substrate in a processing chamber during a substrate processing operation. the substrate support assembly comprises cooling features configured to cool the susceptor at a cooling rate of greater than 2 degrees celsius per minute subsequent to the substrate processing operation.