Applied materials, inc. (20250069857). MULTILAYER COATING FOR CORROSION RESISTANCE
MULTILAYER COATING FOR CORROSION RESISTANCE
Organization Name
Inventor(s)
Amir H. Tavakoli of San Jose CA (US)
Tony S. Kaushal of Campbell CA (US)
Peter Reimer of San Jose CA (US)
David Jorgensen of Mountain View CA (US)
MULTILAYER COATING FOR CORROSION RESISTANCE
This abstract first appeared for US patent application 20250069857 titled 'MULTILAYER COATING FOR CORROSION RESISTANCE
Original Abstract Submitted
exemplary methods of coating a metal-containing component are described. the methods are developed to increase corrosion resistance and improve coating adhesion to a metal substrate. the methods include forming a bonding layer on a metal substrate, where the bonding layer includes an oxide of a metal in the metal substrate. the coating methods further include depositing a stress buffer layer on the bonding layer, where the stress buffer layer is characterized by a stress buffer layer coefficient of thermal expansion (cte) that is less than a metal substrate cte and a bonding layer cte. the coating methods also include depositing an environmental barrier layer on the stress buffer layer, where a ratio of the metal substrate cte to an environmental barrier layer cte is greater than or about 20:1, and where the environmental barrier layer includes silicon oxide. the metal-containing components may be used in fabrication equipment for electronic devices.
