Applied materials, inc. (20250003742). ENHANCED CROSS SECTIONAL FEATURES MEASUREMENT METHODOLOGY
ENHANCED CROSS SECTIONAL FEATURES MEASUREMENT METHODOLOGY
Organization Name
Inventor(s)
Manoj Kumar Dayyala of Newark CA US
Jorge Pablo Fernandez of Saratoga CA US
Kourosh Nafisi of San Jose CA US
ENHANCED CROSS SECTIONAL FEATURES MEASUREMENT METHODOLOGY
This abstract first appeared for US patent application 20250003742 titled 'ENHANCED CROSS SECTIONAL FEATURES MEASUREMENT METHODOLOGY
Original Abstract Submitted
disclosed herein are methods and systems for analyzing a cross-sectional feature of a structural element on a semiconductor wafer to determine whether an isolated or a systemic failure to reach preselected parameters occurred.