Applied materials, inc. (20250003737). OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR
OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR
Organization Name
Inventor(s)
Andrew Thomas Koll of West Linn OR US
Ayra Mae Sears of Portland OR US
Jered Dean Richter of Beaverton OR US
OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR
This abstract first appeared for US patent application 20250003737 titled 'OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR
Original Abstract Submitted
a precision motion characterization system includes an interferometer configured to emit a laser beam, a first object coupled to a non-moving portion of a linear actuator, and a second object coupled to a moving body of the linear actuator. the first object is configured to reflect a first portion of the laser beam and the second object is configured to reflect a second portion of the laser beam, and a processor is to perform operations including receiving a first image comprising a plurality of first linear interference fringes corresponding to the first portion of the laser beam, determining a first characteristic of the plurality of first linear interference fringes, receiving a second image comprising a plurality of second linear interference fringes corresponding to the second portion of the laser beam, and determining a second characteristic of the plurality of second linear interference fringes.