Applied materials, inc. (20240420984). ELECTROSTATIC SUBSTRATE SUPPORT
ELECTROSTATIC SUBSTRATE SUPPORT
Organization Name
Inventor(s)
Andrew Nguyen of San Jose CA (US)
Yogananda Sarode Vishwanath of Bangalore (IN)
Tom K. Cho of Los Altos Hills CA (US)
Jennifer Y. Sun of Mountain View CA (US)
Xue Yang Chang of San Jose CA (US)
ELECTROSTATIC SUBSTRATE SUPPORT
This abstract first appeared for US patent application 20240420984 titled 'ELECTROSTATIC SUBSTRATE SUPPORT
Original Abstract Submitted
an electrostatic chuck (esc) including a ceramic body having a first surface with two or more regions defined on the first surface arranged concentrically with respect to each other on the first surface. each region includes a retaining ring arranged on the first surface and defining an outer edge of the region, and structures arranged on the first surface and within the region configured to support a surface of a substrate when the substrate is retained by the electrostatic chuck. the esc includes gas conduits configured to introduce a gas into the two or more regions through the ceramic body and to the first surface, and embedded electrodes within the ceramic body and arranged with respect to the first surface and configured to generate a retaining force on the surface of the substrate.