Applied materials, inc. (20240420981). SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

Organization Name

applied materials, inc.

Inventor(s)

Jeffrey C. Hudgens of San Francisco CA (US)

Ulrich Oldendorf of Darmstadt (DE)

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

This abstract first appeared for US patent application 20240420981 titled 'SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

Original Abstract Submitted

disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. the transfer chamber includes a first magnetic levitation platform, having a magnetic levitation track disposed along a horizontal length of the transfer chamber and configured to generate a first magnetic field. the transfer chamber also includes a second magnetic levitation track disposed along a horizontal width of the transfer chamber and configured to generate a second magnetic field. a first plane of the first magnetic field crosses a second plane of the second magnetic field at a junction. the platform further includes at least one substrate carrier configured to move according to at least one of the first magnetic field or the second magnetic field.