Applied materials, inc. (20240417266). PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
Organization Name
Inventor(s)
Peter J. Guercio of Queen Creek AZ (US)
Paul Westphal of Scottsdale AZ (US)
Kirk Allen Fisher of Tempe AZ (US)
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
This abstract first appeared for US patent application 20240417266 titled 'PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
Original Abstract Submitted
the present invention relates to a new process for manufacturing a silicon carbide (sic) coated body by depositing sic in a chemical vapor deposition method using dimethyldichlorosilane (dms) as the silane source on a graphite substrate. a further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.