Applied materials, inc. (20240416514). CALIBRATION SYSTEM
CALIBRATION SYSTEM
Organization Name
Inventor(s)
Nicholas Michael Kopec of Sunnyvale CA (US)
Lyle Kosinski of San Jose CA (US)
Matvey Farber of Redwood City CA (US)
Jeffrey Hudgens of San Francisco CA (US)
CALIBRATION SYSTEM
This abstract first appeared for US patent application 20240416514 titled 'CALIBRATION SYSTEM
Original Abstract Submitted
a calibration system is of a wafer processing system. the calibration system includes a calibration substrate configured to be disposed on a plurality of support structures of the wafer processing system. the calibration substrate includes a calibration pin. the calibration substrate enables a calibration operation of a robot arm of the wafer processing system to automatically determine robot arm error of the robot arm.
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