Applied materials, inc. (20240412959). PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLASMAS
PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLASMAS
Organization Name
Inventor(s)
David Peterson of San Jose CA (US)
David Coumou of Webster NY (US)
Chuang-Chia Lin of San Ramon CA (US)
Kelvin Chan of San Ramon CA (US)
Farzad Houshmand of Mountain View CA (US)
Ping-Hwa Hsieh of Milpitas CA (US)
Kristopher Ford of Santa Clara CA (US)
PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLASMAS
This abstract first appeared for US patent application 20240412959 titled 'PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLASMAS
Original Abstract Submitted
embodiments disclosed herein include a module, comprising: a substrate, wherein the substrate comprises a dielectric material, and a microstrip resonator on the substrate. in an embodiment, a microstrip transmission line is on the substrate adjacent to the microstrip resonator, and the microstrip resonator is spaced from the microstrip transmission line by a gap. in an embodiment, a ground plane on a surface of the substrate is opposite from the microstrip resonator.
