PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

Organization Name

Inventor(s)

Dinkesh Huderi Somanna of San Jose CA (US)

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

This abstract first appeared for US patent application 20240412954 titled 'PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

Original Abstract Submitted

embodiments of process chambers having cooling plate are provided herein. in some embodiments, a process chamber includes: a chamber body defining an interior volume therein, the chamber body having a view port side having an opening configured as a view port, a pump side having a pump port, and a shutter side opposite the view port side, wherein the port view side, the pump side, and the shutter side are all different sides of the chamber body; a first cooling plate coupled to the view port side and having one or more first coolant channels; a second cooling plate coupled to the pump side and having one or more second coolant channels; and a third cooling plate coupled to the shutter side and having one or more third coolant channels.