Applied materials, inc. (20240247374). PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION simplified abstract
PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION
Organization Name
Inventor(s)
Shashidhara Patel H B of Bangalore (IN)
Nagaraj Naik of Bangalore (IN)
Muhannad Mustafa of Milpitas CA (US)
PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240247374 titled 'PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION
Abstract: Embodiments of precursor delivery systems are described herein. The precursor delivery systems include a reservoir with a cylindrical body, a conical shaped inlet on one end, and a conical shaped outlet on the other end. The angles of the conical shaped inlet and outlet range from 5 to 45 degrees. Purging the reservoir is at least 50% faster compared to reservoirs without conical shaped inlets and outlets. Methods for removing particles from the reservoir are also discussed, with more particles being removed compared to traditional reservoirs.
- Simplified Explanation:
The patent application describes precursor delivery systems with conical shaped inlets and outlets in a reservoir, leading to faster purging and improved particle removal.
- Key Features and Innovation:
- Reservoir with conical shaped inlet and outlet - Angles of inlet and outlet range from 5 to 45 degrees - Faster purging time by at least 50% - Improved particle removal compared to traditional reservoirs
- Potential Applications:
- Chemical manufacturing - Pharmaceutical production - Semiconductor fabrication
- Problems Solved:
- Slow purging time in traditional reservoirs - Inefficient particle removal
- Benefits:
- Increased efficiency in precursor delivery - Enhanced cleanliness in the reservoir - Time and cost savings in production processes
- Commercial Applications:
"Enhanced Precursor Delivery Systems for Industrial Manufacturing Processes"
- Questions about Precursor Delivery Systems:
1. How do conical shaped inlets and outlets improve the efficiency of precursor delivery systems? 2. What are the potential drawbacks of using conical shaped inlets and outlets in reservoirs?
- Frequently Updated Research:
Stay updated on the latest advancements in precursor delivery systems for various industries to optimize production processes and improve product quality.
Original Abstract Submitted
embodiments of precursor delivery systems are described herein. the precursor delivery systems include a reservoir having a cylindrical body, a conical shaped inlet on a first end of the cylindrical body, and a conical shaped outlet on a second end of the cylindrical body. each of the conical shaped inlet and the conical shaped outlet independently have an angle in a range of from 5 degrees to 45 degrees. the amount of time to purge the reservoir described herein is reduced by at least 50% compared to reservoirs not having a conical shaped inlet and/or a conical shaped outlet. additional embodiments relate to methods for removing particles from the reservoir. an increased number of particles are removed from the reservoir described herein compared to reservoirs not having a conical shaped inlet and/or a conical shaped outlet.