Applied Materials, Inc. (20250062143). SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
Organization Name
Inventor(s)
Deepak Patel of Karnataka (IN)
Pandu Maddherla of Karnataka (IN)
Sushant S. Koshti of Sunnyvale CA (US)
Jeffrey C. Hudgens of San Francisco CA (US)
SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
This abstract first appeared for US patent application 20250062143 titled 'SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
Original Abstract Submitted
a load lock including a substrate support device for supporting a substrate, and an indexer coupled to the substrate support device. the substrate support device may take measurements and acquire data to verify features of the supported substrate and an associated manufacturing system. substrate features that are measured include, substrate temperature, substrate warping, and a substrate presence, absence, or misplacement on the support device. system features that are measured include system vibrations and substrate transfer mechanism calibration data. the substrate support device sensors and communications circuits can be integrated into the substrate support device, through use of an additive manufacturing process in making the substrate support device.