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Apple inc. (20250105594). SELF-MIXING INTERFEROMETRY USING BACKSIDE-EMITTING VCSEL DIODE WITH INTEGRATED PHOTODETECTOR

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SELF-MIXING INTERFEROMETRY USING BACKSIDE-EMITTING VCSEL DIODE WITH INTEGRATED PHOTODETECTOR

Organization Name

apple inc.

Inventor(s)

Pengfei Qiao of El Cerrito CA US

Fei Tan of Sunnyvale CA US

Tong Chen of Fremont CA US

Qinghong Du of Fremont CA US

Siddharth Joshi of Saint-Egreve FR

Nicolas Hotellier of Champagnier FR

Alexander Hein of Munich DE

Pierre-Antoine Delean of Domene FR

SELF-MIXING INTERFEROMETRY USING BACKSIDE-EMITTING VCSEL DIODE WITH INTEGRATED PHOTODETECTOR

This abstract first appeared for US patent application 20250105594 titled 'SELF-MIXING INTERFEROMETRY USING BACKSIDE-EMITTING VCSEL DIODE WITH INTEGRATED PHOTODETECTOR

Original Abstract Submitted

embodiments described herein include an optoelectronic sensing device having a vertical cavity surface emitting laser (vcsel), a resonance cavity photodetector (rcpd), and a tunnel junction. the vcsel is at least partly defined by a first set of semiconductor layers disposed on a substrate. the first set of semiconductor layers includes a first active region. the vcsel is configured to emit laser light towards the substrate, upon application of a first bias voltage, and undergo self-mixing interference upon reception of reflections or backscatters thereof. the rcpd is vertically adjacent to the vcsel and is at least partly defined by a second set of semiconductor layers disposed on the substrate. the second set of semiconductor layers includes a second active region. the rcpd is configured to detect, upon application of a second bias voltage, the self-mixing interference. the tunnel junction is disposed between the first active region and the second active region.

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