20250234633. Semiconductor De (SAMSUNG ELECTRONICS ., .)
SEMICONDUCTOR DEVICE
Abstract: a semiconductor device is provided. the semiconductor device includes a substrate including an active pattern, a gate electrode extending in a first direction and crossing the active pattern which extends in a second direction, a separation structure crossing the active pattern and extending in the first direction, a first gate dielectric pattern disposed on a side surface of the gate electrode, a second gate dielectric pattern disposed on a side surface of the separation structure, and a gate capping pattern covering a top surface of the gate electrode. a level of a top surface of the separation structure is higher than a level of a top surface of the gate capping pattern.
Inventor(s): SANGMIN YOO, JUYOUN KIM, HYUNGJOO NA, BONGSEOK SUH, JOOHO JUNG, EUICHUL HWANG, SUNGMOON LEE
CPC Classification: H10D84/038 (No explanation available)
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