INTEGRATED CIRCUIT DEVICE WITH A POWER DELIVERY NETWORK

Abstract: an integrated circuit device includes: a rear insulating layer; a nanosheet stacked structure arranged on the rear insulating layer and including a plurality of nanosheets; a pair of source/drain regions positioned on sides of the nanosheet stacked structure in a first horizontal direction; a gate electrode extending in a second horizontal direction intersecting the first horizontal direction, on the nanosheet stacked structure; a contact plug connected to at least one of the pair of source/drain regions; a rear contact plug passing through the rear insulating layer and connected to at least one of the pair of source/drain regions; and a spacer layer including a contact spacer layer surrounding part of a side surface of the rear contact plug.

Inventor(s): Seowoo NAM, Heonjong SHIN, Sanghee LEE, Jaeran JANG

CPC Classification: H10D64/251 (No explanation available)

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