CALABASH-SHAPED MIM CAPACITOR STRUCTURE AND FABRICATING METHOD OF THE SAME

Abstract: a calabash-shaped mim capacitor structure includes a stacked layer. the stacked layer includes numerous dielectric layers. an mim capacitor is disposed within the stacked layer. the mim capacitor includes a calabash-shaped profile. the calabash-shaped profile includes a rounded bottom, a narrow body and a rounded shoulder disposed from bottom to top.