RESONATOR CHIP AND MANUFACTURING METHOD THEREOF

Abstract: a resonator chip and a manufacturing method thereof are provided. the manufacturing method of the resonator chip includes the following steps. a quartz wafer is provided. the quartz wafer has a first surface and a second surface opposite to the first surface. a first etching process is performed on the quartz wafer to form multiple inverted mesa portions, and the inverted mesa portions has a first thickness. the quartz wafer is singulated to form multiple resonator chips. each of the resonator chips includes one of the inverted mesa portions. a second etching process is performed on the resonator chips to form chamfers at edges of the resonator chips.

Inventor(s): Wen Yang Chung, Jing-Kai Liao, Jun-Xiang Zeng, Yu Wen Feng, Chi-Fei Su, Tzu-Hsiu Peng

CPC Classification: H03H3/02 (IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (measuring, testing ; arrangements for producing a reverberation or echo sound ; impedance networks or resonators consisting of distributed impedances, e.g. of the waveguide type, ; control of amplification, e.g. bandwidth control of amplifiers, ; tuning resonant circuits, e.g. tuning coupled resonant circuits, ; networks for modifying the frequency characteristics of communication systems ))

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