20250232998. Wafer Sensor (SAMSUNG ELECTRONICS ., .)

WAFER SENSOR AND WAFER ALIGNMENT SYSTEM INCLUDING THE SAME

Abstract: a wafer sensor includes a wafer substrate and a plurality of pixels on the wafer substrate, where each pixel of the plurality of pixels includes a blocking layer, a reflective layer on the blocking layer, a phase change material layer on the reflective layer, and a plurality of metal antennas on the phase change material layer.

Inventor(s): Junghyun PARK, Minkyung Lee, Sangyun Park, Byunghoon Ko

CPC Classification: H01L21/68 (for positioning, orientation or alignment)

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