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20250231543. Manufacturing Ap (Hitachi High-Tech)

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MANUFACTURING APPARATUS AND OPERATING METHOD OF MANUFACTURING APPARATUS

Abstract: an object of the invention is to provide a technique capable of improving efficiency of work performed on an apparatus. according to one typical aspect of the invention, there is provided a manufacturing apparatus including: a plurality of component devices; and a control unit configured to transmit data signals to the plurality of component devices. the plurality of component devices are categorized as groups by a function, and have one or more groups including a first slave device group including at least one component device among the plurality of component devices, and a second slave device group including at least one component device among component devices excluding the component device provided in the first slave device group from the plurality of component devices, and the control unit transmits the data signals to the first slave device group and the second slave device group.

Inventor(s): Mitsuhiro HIRANAKA, Takahiro ICHIKAWA, Makoto KASHIBE

CPC Classification: G05B19/0423 (using digital processors ( takes precedence))

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