ANTI-REFLECTIVE COATING COMPOSITION

Abstract: the present disclosure provides an anti-reflective coating composition comprising an organic polymer; the organic polymer comprises a crosslinkable polymer; the crosslinkable polymer comprises a monomer unit formed by a monomer represented by formula (i). as compared with the prior art, the crosslinkable polymer provided by the present disclosure comprises hydroxyl group can be crosslinked with a crosslinking agent containing amino group and/or alkoxyl-substituted amino group at a relatively low baking temperature, so that the baking temperature of the anti-reflective coating composition is reduced. the outgassing during its baking process can be effectively solved or reduced. by doing so, unnecessary cleaning processes are reduced while the patterns damage due to falling of solid particles formed by gas condensation is significantly reduced. therefore, the overall process flow can be simplified and the relevant cost could be reduced effectively.

Inventor(s): Aiqiang Zhang, Renzhi Chen, Yuan Chen, Yimin Jiang

CPC Classification: G03F7/11 (having cover layers or intermediate layers, e.g. subbing layers {( - , take precedence)})

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