FRAME ASSEMBLY USED FOR MOUNTING PELLICLE ON PHOTOMASK

Abstract: a frame assembly for mounting a pellicle on a photomask is disclosed. the frame assembly includes a frame to which the pellicle is attached, a stud attached to the photomask, and a fixture that is inserted into the lower side of the frame. the stud and the fixture are magnetically bonded to each other, and a gap of a certain height is created between the photomask and the frame by the stud under the fixture. this eliminates the need for precise alignment of the frame during the mounting process on the photomask, and facilitates the separation of the frame from the photomask for reuse. the formation of the gap eliminates the need for a separate process to create vent holes in the frame.

Inventor(s): Sang-Min JEONG

CPC Classification: G03F1/64 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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