ACCELERATION SENSOR

Abstract: an acceleration sensor, including a base; anchor point; an inner side supporting unit, a middle part of which is fixed to the base through the anchor point, a first seesaw unit elastically connected to an outer side of a first end of the inner side supporting unit; a second seesaw unit elastically connected to an outer side of a second end of the inner side supporting unit; and an out-of-plane displacement detection unit. each of the first seesaw unit and the second seesaw unit is symmetrically distributed about a symmetry axis of the acceleration sensor. the first seesaw unit includes two first seesaw structures at two sides of the symmetry axis and the second seesaw unit includes two second seesaw structures at two sides of the symmetry axis. an influence of y-axis angular acceleration on the acceleration sensor is greatly reduced and a cross inhibition ratio thereof is improved.

Inventor(s): Shitao Yan, Lingcheng Kong, Zhan Zhan, Shan Yang, Zhao Ma, Xiao Kan, Yang Li, Kahkeen Lai, Qiuyu Tan

CPC Classification: G01P15/125 (by capacitive pick-up)

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