MULTI-GAS DIGITAL CARTRIDGE BASED ON METAL OXIDE MEMS SENSOR ARRAY FOR THE DETECTION OF PATTERNS RELATED TO THE AIR COMPOSITION AND RELATED STABILIZATION METHOD

Abstract: multi-gas digital cartridge based on metal oxide mems sensor array for the detection of patterns related to the air composition. the sensitive elements of the cartridge are stabilized, by means of an off gassing and controlled passivation technique, in a production period of 72/100 hours instead of the current 4-6 months necessary for natural stabilization. the cartridge, whose operation is ensured by a. process of dynamic scanning and virtualization of sensitive elements by applying a control voltage, once stabilized with the method described here is able to selectively detect total volatile organic compounds (tvoc) with spectrographic profile grouped by main families (alcohols, ethers, ketones, organic acids, aliphatic hydrocarbons, aromatic hydrocarbons, amines, aldehydes, alkenes, halogenated organic compounds, organic sulfur compounds, organic nitrogen compounds), carbon monoxide (co), nitrogen dioxide (no), formaldehyde (hcho), ozone (o), oxygen (o), ammonia (nh). sulfur dioxide (so), hydrogen sulfide (hs), hydrogen (h), hydrofluoric acid (hf), hydrogen cyanide (hcn), hydrochloric acid (hcl), chlorine dioxide (cio), methyl mercaptan (hs), bromine (br), thanks to precise surveys obtained from two distinct measurement channels achieved by selective chemical filtration separation and a pattern recognition and extraction process based on principal component analysis.

Inventor(s): Ciro FORMISANO

CPC Classification: G01N33/0031 ({comprising two or more sensors, e.g. a sensor array})

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