ELEMENTAL IDENTIFICATION BASED ON PHASE ANALYSIS

Abstract: in some embodiments, a support apparatus for a scientific instrument includes an interface device configured to receive a dataset including a charged-particle-microscope (cpm) image of a sample and a plurality of energy-dispersive x-ray spectroscopy (eds) spectra of the sample. each of the eds spectra corresponds to a respective pixel of the cpm image. the support apparatus also includes one or more electronic processing devices configured to: compute a phase map of the sample by applying phase analysis to the dataset, the phase map identifying groups of pixels representing different respective phases of the sample; for each group of the identified groups of pixels, determine a respective element set based on the eds spectra corresponding to the group; and for a selected chemical element, compute a corresponding elemental map of the sample based on the identified groups of pixels and the determined respective element sets.

Inventor(s): Marek Vanatka, Chris Stephens, Petr Hlavenka, Jakub Klus

CPC Classification: G01N23/2209 (using wavelength dispersive spectroscopy [WDS])

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