SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD

Abstract: a magnetization unit magnetizes an object to be inspected. a magnetic powder adhesion unit applies a magnetic powder liquid and adheres magnetic powder to the magnetized object. an illumination unit illuminates a space containing the object with ultraviolet light. a first optical filter transmits a first wavelength that is a wavelength of the ultraviolet light. a second optical filter transmits a second wavelength that is a wavelength of excitation light of the magnetic powder undergoing excitation by the ultraviolet light. an image capture unit captures an image of a surface of the object to which the magnetic powder is adhered, in the space illuminated with the ultraviolet light, via the first optical filter and generates a first captured image, and captures an image of the surface of the object to which the magnetic powder is adhered via the second optical filter and generates a second captured image. an inspection unit inspects a visible first surface property of the surface of the object based on the first captured image, and inspects a second surface property of the surface of the object based on the second captured image, the second surface property being visually identifiable by magnetic particle inspection.

Inventor(s): Takeo NAKATA, Takeshi MASAKA, Koki SUGIURA, Yoshiyuki OTA

CPC Classification: G01N21/91 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms , ))

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