INSPECTING UNIT

Abstract: an inspecting unit for use in a laser processing apparatus includes a camera configured to image a spot of a laser beam, and a processing unit configured to generate a light intensity at two-dimensional x-y coordinates corresponding to a two-dimensional image imaged by the camera. the processing unit includes a determining unit configured to generate a three-dimensional approximate curve or an approximate curved surface such that the light intensity corresponding to the two-dimensional coordinates is set as a z-coordinate, and determine that there is dirt, a flaw, or an abnormality in an optical system on an optical path on the laser oscillator side of a position at which the spot is imaged when a difference between the first light intensity of the z-coordinate corresponding to the two-dimensional coordinates and a second light intensity indicated by the approximate curve or the approximate curved surface exceeds an allowable value.

Inventor(s): Yuta MIZUMOTO, Kenji NARITA

CPC Classification: G01M11/0207 (TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR)

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