SURFACE SHAPE MEASUREMENT DEVICE

Abstract: a surface shape measuring device measures the three-dimensional shape of a measurement surface in an object to be measured shaped as a rotating body or an approximate rotating body. the surface shape measuring device includes: a rotary table that rotates the object to be measured; an encoder that sequentially outputs signals according to the rotation angle of the rotary table; an optical sectioning sensor that irradiates light onto the measurement surface and acquires a plurality of optical section line image data by sequentially capturing optical section lines generated by the irradiated light, which move across the measurement surface as the rotary table rotates, triggered by a signal output from the encoder; and an image processing unit that generates an image showing the surface shape of the measurement surface by sequentially arranging the respective optical section line image data according to the corresponding rotation angle.

Inventor(s): Tetsuro Tanabe, Akira Nishio, Toshiyuki Mawatari

CPC Classification: G01B11/2522 (MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS)

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