20250230546. Selective Control (Lam Research)
SELECTIVE CONTROL OF MULTI-STATION PROCESSING CHAMBER COMPONENTS
Abstract: various embodiments herein relate to apparatuses, systems, and methods for selective control of multi-station processing chamber components. in some embodiments, a method comprises: determining for a station of a plurality of stations, a number of deposition cycles to be performed; causing a first number of deposition cycles to be performed for each of the plurality of stations by causing a first plurality of control components associated with a first station and a second plurality of control components associated with a second station to be set to a first position; and responsive to determining that the first number of deposition cycles has been completed: causing at least one component of the first plurality of control components to be changed to a second position; and causing additional deposition cycles to be performed for the second station by causing the second plurality of control components to remain in the first position.
Inventor(s): Douglas Walter Agnew, Eli Jeon, Daniel Boatright, Trung T. Le, Tuan Anh Nguyen, Cody Barnett, Joseph R. Abel, Siddappa Attur, Mani Sankaran Kartha
CPC Classification: C23C16/52 (Controlling or regulating the coating process {(, take precedence)})
Search for rejections for patent application number 20250230546
- Patent Applications
- Lam Research Corporation
- CPC C23C16/52
- Douglas Walter Agnew of Portland OR US
- Eli Jeon of Sherwood OR US
- Daniel Boatright of Estacada OR US
- Trung T. Le of Vancouver WA US
- Tuan Anh Nguyen of Beaverton OR US
- Cody Barnett of Beaverton OR US
- Joseph R. Abel of West Linn OR US
- Siddappa Attur of Portland OR US
- Mani Sankaran Kartha of Bangalore IN