BRUSH POLYMER TERMINATED WITH PHOSPHONATE FOR DSA

Abstract: the disclosed subject matter relates compounds of structure (i), and polymers of structure (ii) having a polydispersity ranging from 1 to about 1.1, compositions comprising said polymers and a spin casting solvent, the process of forming a pinning layer selectively on metal with said composition and the process of using said pinning layers to affect chemoepitaxy directed self-assembly of an overlying block copolymer, and the subsequent process of pattern transfer of this self-assembled layer into a substrate by etching.

Inventor(s): EunJeong JEONG, Durairaj BASKARAN, Jihoon KIM

CPC Classification: C08F4/6497 (MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS)

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