IMAGE SENSOR

Abstract: an image sensor includes a substrate including a plurality of pixel areas, a pixel isolation film disposed in the substrate, the pixel isolation film separating the plurality of pixel areas from each other, and each pixel area of the plurality of pixel areas including, a first impurity region, a second impurity region around the first impurity region in a first direction, and an element isolation film between the first impurity region and the second impurity region in the first direction, the element isolation film including, a first insulating layer, a second insulating layer on a first portion of the first insulating layer and formed of a material different from a material of the first insulating layer, and a third insulating layer, a portion of the third insulating layer on the second insulating layer, and a portion of the third insulating layer directly in contact with the first insulating layer.

Inventor(s): Sanghoon KIM, Hyeji SHIN

CPC Classification: H10F39/807 (No explanation available)

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