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20250220353. Mems Microphone (Goertek Microelectronics .)

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MEMS MICROPHONE AND ELECTRONIC DEVICE

Abstract: disclosed are a mems microphone and an electronic device. the mems microphone comprises a substrate, a diaphragm, and a backplate. the diaphragm has a fixed part and a suspended part, and the backplate is formed with a support thereon, which divides the suspended part into an inner suspended region and an outer suspended region.

Inventor(s): Quanbo Zou

CPC Classification: H04R7/18 (at the periphery)

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