ETCHED REGION CONFIGURATIONS IN SOLIDLY-MOUNTED ACOUSTIC RESONATORS

Abstract: an acoustic resonator is provided that a substrate; a piezoelectric layer, a bragg reflector layer disposed between the substrate and the piezoelectric layer, and an idt at a surface of the piezoelectric layer that faces the bragg reflector layer. the idt includes a plurality of interleaved fingers extending from first and second busbars. moreover, an etched region extends into at least a portion of the piezoelectric layer, the etched region including an area between the first busbar and a tip of at least one finger of the plurality of interleaved fingers extending from the second busbar in a first direction substantially parallel to a direction in which the interleaved fingers extend.

Inventor(s): Bryant GARCIA, Patrick TURNER, Greg DYER, Naohiro NODAKE, Albert CARDONA, Takeshi NAKAO, Drew MOROSIN

CPC Classification: H03H9/175 (IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (measuring, testing ; arrangements for producing a reverberation or echo sound ; impedance networks or resonators consisting of distributed impedances, e.g. of the waveguide type, ; control of amplification, e.g. bandwidth control of amplifiers, ; tuning resonant circuits, e.g. tuning coupled resonant circuits, ; networks for modifying the frequency characteristics of communication systems ))

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