FILM BULK ACOUSTIC RESONATOR

Abstract: a film bulk acoustic resonator, including: a substrate; an acoustic reflection structure; a bottom electrode; a piezoelectric film; a top electrode; and a raised frame. a spatial region formed by overlapping of the acoustic reflection structure, the bottom electrode, and the piezoelectric film and the top electrode in a thickness direction of the film bulk acoustic resonator is a resonance region, in which the raised frame is arranged, and openings are formed at a side of the raised frame away from the top electrode. the film bulk acoustic resonator can reduce the area ratio of the raised frame in the resonance region and the intensity of the parasitic resonance peak introduced by the raised frame without reducing the q value of the resonator and without increasing manufacturing process steps.

Inventor(s): Shuai Yang, Zhang Zhang, Ke Wu, Lirong Zhang, Zhiqiang Zhuang, Chao Wang

CPC Classification: H03H9/02125 (IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (measuring, testing ; arrangements for producing a reverberation or echo sound ; impedance networks or resonators consisting of distributed impedances, e.g. of the waveguide type, ; control of amplification, e.g. bandwidth control of amplifiers, ; tuning resonant circuits, e.g. tuning coupled resonant circuits, ; networks for modifying the frequency characteristics of communication systems ))

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