FLOW RATE ADJUSTING DEVICE AND CONTROL METHOD OF FLOW RATE ADJUSTING DEVICE

Abstract: provided is a flow rate adjusting device including: a flow metering portion; a flow rate adjusting portion; a flow rate setting unit; and a control unit. the flow rate adjusting portion has a stepping motor that moves a valve body along an axis and a motor driver that outputs excitation current to the stepping motor. the control unit controls the flow rate adjusting portion to move the valve body by an amount so that a measured flow rate value measured by the flow metering portion matches a set flow rate value, the amount corresponding to a difference between both the values, controls the motor driver to generate excitation current of a first current value during an operation to move the valve body, and controls the motor driver to generate excitation current of a second current value lower than the first current value during an operation to stop the valve body.

Inventor(s): Mizuho KOUCHI

CPC Classification: G05D7/0635 (SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES)

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