COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN IMAGING DATASET OF A WAFER, CORRESPONDING COMPUTER-READABLE MEDIUM, COMPUTER PROGRAM PRODUCT AND SYSTEMS MAKING USE OF SUCH METHODS

Abstract: a computer implemented method for defect detection comprises obtaining an imaging dataset of a wafer, and verifying a defect criterion in a subset of the imaging dataset of the wafer. the defect criterion comprises an observation representation of the subset of the imaging dataset with respect to a number of characteristic elements derived from reference images of semiconductor structures. the observation representation and the characteristic elements define a reconstruction of minimal reconstruction error, and a tolerance statistic on defect-free representations of subsets of defect-free observed imaging datasets. each of the defect-free representations and the characteristic elements define a reconstruction of minimal reconstruction error of a subset of the defect-free imaging datasets. the computer implemented method further comprises generating defect information.

Inventor(s): Abhilash SRIKANTHA, Anna ALPEROVICH, Bjoern BARZ, Niklas MEVENKAMP, Jens Timo NEUMANN, Eugen FOCA, Johannes PERSCH

CPC Classification: G05B19/41875 (CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables ; systems for regulating electric or magnetic variables ; control devices or systems insofar as characterised by mechanical features only ))

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