METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACTURING AN ARTICLE

Abstract: a method of shaping a surface comprises dispensing formable material onto a substrate held by a substrate chuck, contacting a plate held by a plate chuck assembly with the formable material to form a film, curing the film to form a cured layer, initiating a separation front between the cured layer and the plate, tilting the plate chuck assembly and/or the substrate chuck in a direction away from the initial separation point, thereby propagating the separation front, applying a force to the plate chuck assembly and/or the substrate chuck away from the other while maintaining or increasing the tilt, until the separation front completely propagates around the cured layer, and continuing to apply the force, until the plate does not contact the cured layer. the plate chuck assembly includes a flexible portion with a central opening, and a cavity formed by the flexible portion. the plate is held by the flexible portion.

Inventor(s): Seth J. Bamesberger, Byung-Jin Choi, Xiaoming Lu

CPC Classification: G03F7/0002 ({Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping})

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