MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

Abstract: the micromirror device includes a mirror portion, a support portion, a movable frame, a second support portion, a driving part, a fixed frame, and a connecting portion. the first support portion is line-symmetrical about the first axis. the second support portion is line-symmetrical about the second axis and includes a second swing shaft disposed on the second axis and a second coupling part. one end of the second swing shaft is connected to the movable frame and the other end is connected to the second coupling part, and the second coupling part extends in a direction from an outer end portion of the second swing shaft on the second axis toward the mirror portion and is connected to the driving part in a region adjacent to the movable frame. the connecting portion is line-symmetrical about the second axis and supports the driving part to be swingable around it.

Inventor(s): Keisuke AOSHIMA

CPC Classification: G02B26/0833 ({the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD ( takes precedence; micromechanical devices in general )})

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