METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE

Abstract: a method and device of inspecting a surface of an interconnect structure are provided. the interconnect structure includes a metal layer and a dielectric layer having fluorescence characteristics. the method includes: generating an excitation light beam from an excitation light source; adjusting the excitation light beam to cause the excitation light beam to form an elongated light spot having a long axis and a short axis on a surface of the interconnect structure, and cause the excitation light beams for forming the elongated light spot to be incident on the surface of the interconnect structure along a direction perpendicular to the long axis of the elongated light spot; receiving a plurality of fluorescent signals generated from the dielectric layer upon excitation thereof by the elongated light spot; and determining a portion of a planar pattern of the metal layer according to the fluorescence signals.

Inventor(s): CHIH-YUAN LIN, YU-WEI LIU, FENG-JUI SHIH, HSIN-YI YEH, HUNG-CHUN LO, CHAO-YU HUANG, CHUN-PIN HSU, CHENG-TAO TSAI

CPC Classification: G01N21/95684 ({Patterns showing highly reflecting parts, e.g. metallic elements})

Search for rejections for patent application number 20250216343