MICRO LED DETECTION DEVICE

Abstract: a micro led detection device comprises a device table provided with a stepper driving module and a first detection module and a second detection module linked with the stepper driving module, the first detection module has a first microscope lens and laser generators, the second detection module has a second microscope lens; a first air-float platform, a second air-float platform, and a third air-float platform air floated on the device table and respectively connected to first and second linear driving modules and at least one third linear driving module, the third air-float platform has a detection platform; and a detection host having ai judgment units and a processing unit, the ai judgment unit receives a captured picture and generates at least one judgment signal from the captured picture, thereby artificial intelligence is used to perform brightness level discrimination, surface defect and etching depth detection on a micro led wafer.

Inventor(s): KUAN-HAN CHEN, YING-YUN CHEN

CPC Classification: G01N21/9501 ({Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step )})

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