METROLOGY DEVICE WITH WAVELENGTH-FREQUENCY MULTIPLEXING

Abstract: an optical metrology device collects data in parallel by multiplexing wavelength and associated frequencies using computer control and electro-optics in a wavelength modulator. the wavelength modulator includes a pair of crossed polarizers and an electro-optical modulator, such as a pockels cell or faraday rotator, disposed between the polarizers. the electro-optical modulator modulates the polarization state of the light in response to a control signal and produces a different amount of polarization rotation for each wavelength in response to each value of the control signal. the control signal causes the electro-optical modulator to modulate the plurality of wavelengths in the light at different frequencies resulting in the production of a wavelength-frequency multiplex from the wavelength modulator. the effect of the sample on the wavelength-frequency multiplex may be used to determine one or more characteristics of the sample.

Inventor(s): Alexander George BOOSALIS

CPC Classification: G01B9/02091 (Interferometers)

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