METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED INDIUM MOLYBDENUM OXIDE LAYERS

Abstract: methods of forming indium molybdenum oxide layers (imo) by vapor deposition are provided. in some embodiments cyclical deposition processes for forming imo layers comprise alternately and sequentially contacting a substrate in a reaction chamber with a vapor phase indium precursor, a vapor phase molybdenum precursor, and one or more oxygen reactants.

Inventor(s): Hameeda Jagalur Basheer, Andrea IIIiberi

CPC Classification: C23C16/405 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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