MULTI-METAL OXIDE COATINGS, RELATED DEVICES AND METHODS

Abstract: multi-metal oxide coatings, and related devices and related methods are provided, among other things. a device comprises a substrate, and a coating on the substrate. the coating comprises a multi-metal oxide. the multi-metal oxide comprises a first species and a second species. a concentration of at least one of the first species, the second species, or any combination thereof, varies through a thickness of the coating. the device can be a component used in a semiconductor manufacturing process.

Inventor(s): Baosheng Sang, Nilesh Gunda, Samuel J. Angeloni

CPC Classification: C23C14/0084 (Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material)

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